FMF

EZ4 / SC4 Benchtop Vacuum Spin Coater, 9999 RPM Programmable Touch Screen Spin Coating Machine for 4 Inch Wafer Thin-Film Coating, 110V/220V

$1,429.39 USD

~~$0.00 USD~~ $1,429.39 USD

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モデルと筐体 EZ4-PP (PPハウジング) SC4-AL（アルミニウム合金ハウジング）

Product Overview

The EZ4 / SC4 is a benchtop vacuum spin coater for photoresist coating, thin-film coating, wafer coating, glass slide coating, ITO conductive glass coating, and small sample preparation workflows. The two selectable models share the same spin-coating function and control platform; the ordering difference is the outer housing material.

Model Options

Variant	Housing material	SKU
EZ4-PP	PP plastic housing	EZ4-PP
SC4-AL	Aluminum alloy housing	SC4-AL

Key Features

Compact laboratory spin coater / spin coating machine for substrates up to 4 inches.
Adjustable spin speed up to 9999 RPM with 1 RPM speed resolution.
Programmable single-step and multi-step operation with speed, time, and acceleration settings.
Maximum spin time of 3000 s with 1 s time resolution.
Maximum acceleration setting of 9999 RPM/s.
Vacuum spin chuck with 4 mm ID / 6 mm OD vacuum tubing connection.
Transparent hinged lid, front control panel, run button, vacuum button, and rear VAC / power interfaces.
Chinese and English menu display with switchable language setting.
Compact benchtop body suitable for glove-box installation when the operating environment fits the equipment requirements.

Specifications

Models	EZ4-PP, SC4-AL
Equipment type	Laboratory spin coater / compact spin processor
Processable substrate size	Up to 4 inches
Maximum spin speed	9999 RPM (no-load)
Speed resolution	1 RPM
Maximum spin time	3000 s
Time resolution	1 s
Maximum ramp rate	9999 RPM/s (no-load)
Substrate and chuck fit	Use with compatible samples up to a standard 4-inch wafer; confirm sample depth and chuck fit before operation.
Overall size	215 mm (W) x 285 mm (D) x 222 mm (H)
Weight	6 kg
Power input	100-120V single-phase, 150W / 200-230V single-phase, 150W
Required vacuum	0.06-0.09 MPa, minimum 1.5 L/min flow rate
Vacuum tubing	4 mm ID, 6 mm OD
Standard package	Spin coater equipment, 10 mm chuck, 25 mm carrying plate, 2 inch chuck, power line, and insert

Controls and Setup

The front interface supports parameter setup for speed, time, and acceleration, plus quick-run and multi-step operation modes.
The rear side includes the fuse, power cable socket, and vacuum pipe interface.
The vacuum line connects the external vacuum pump and chuck so the sample can be held by vacuum during spin coating.
Place the equipment on a flat, stable surface with good ventilation before operation.

Selection Notes

Choose EZ4-PP when a PP plastic housing is preferred, or choose SC4-AL when an aluminum alloy housing is preferred. Confirm substrate size, chuck fit, voltage version, plug type, and vacuum setup before ordering.